This book covers the experimental and theoretical understanding of surface and thin film processes. It presents a unique description of surface processes in adsortion and crystal growth, including bonding in metals and semiconductors. Emphasis is placed on the strong link between science and teachnogy in the description of, and reseach for, new devices based on thin film and surface science. Practical experimental design, sample preparation and analytical techniques are covered, including detailed discussions of Auger electron spectroscopy and microscopy. Thermodynamic and kinetic models of electronic, atomic and vibrational structure are emphasized thought.The book provides extensive leads into practical and research literature, as well as to resources on the Wold Wide Web. Each chapter contains problems which aim to develop awareness of the subject and the menthods used.
Aimed as a graduate textbook, this book will also be useful as a sourcebook for graduate students,researchers and practioners in physics,chemistry,materials science and engineering.
Chapter 1 Introduction to surface processes
Chapter 2 Surfaces in vacuum: ultra-high vacuum techniques and processes
Chapter 3 Electron-based techniques for examining surface and thin film processes
Chapter 4 Surface processes in adsorption
Chapter 5 Surface processes in epitaxial growth
Chapter 6 Electronic structure and emission processes at metallic surfaces
Chapter 7 Semiconductor surfaces and interfaces
Chapter 8 Surface processes in thin film devices
Chapter 9 Postscript - where do we go from here?